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E-MONSOON

High frequency electrons sources (neutralizers)

Description

Electrons sources (Neutralizers) are designed for use in ion-beam sputtering processes to neutralize a positive charge in the processes of ion-beam cleaning and activation, ion-beam sputtering, ion polishing, as well as independent devices for scientific and research applications.
Provides generation of electrons with emission current up to 1500 mA and energy.
There is a source of electrons built on the basis of a high-frequency induction coupled discharge with a constant bias and an extraction diaphragm.

Main advantages

- Wide range of application
- Does not contamintate of substrate
-  Long lifetime, easy maintenance.
- Built-in matching device
- Simple installation.
- Full set of power supplies available including automatic controller.

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